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PRODUCTS

Granite Base Linear Motor Stage

Linear Motor Stage

  • Model: Custom Multi-Axis Granite Linear Motor Stage
  • Description: 5‑axis granite‑gantry motion stage with direct‑drive linear motors, sub‑micron accuracy, synchronized multi‑axis kinematics, and high stability for semiconductor, AOI, laser micromachining, and metrology applications.
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  • Download 3D & 2D Drawings

Core Technologies (Technical Advantages)

Ultimate Structural Integrity & Stability: The premium natural granite gantry foundation provides superior vibration damping and thermal consistency, ensuring long‑term geometric accuracy.Direct‑Drive Actuation & High‑Dynamic Response: Advanced linear motors eliminate friction and backlash, delivering high‑dynamic acceleration and ultra‑smooth motion.Synchronized Multi‑Axis Kinematics: Supports complex multi‑station or 5‑axis synchronized motion with integrated high‑torque rotary and linear actuators for intricate 3D paths.Sub‑Micron Positioning & Feedback Excellence: High‑resolution optical encoders enable full closed‑loop control with micron‑level accuracy and sub‑micron repeatability.Optimized Cable & Life‑Cycle Management: High‑flex cable carriers and clean‑room compatible lubrication routing reduce interference and extend maintenance intervals.

Target Applications

Semiconductor & Wafer Processing: Wafer inspection, thin‑film measurement, and lithography‑related precision motion.Advanced Optical Inspection (AOI): High‑speed scanning for FPD, micro‑LED, and high‑density PCB inspection.Precision Laser Micromachining: Ultra‑fine laser cutting, etching, and micro‑drilling for medical and aerospace components.Metrology & Calibration: High‑stability motion bases for CMM, optical metrology, and non‑contact measurement systems.